UV LED lithography with digitally tunable exposure dose

Journal of Micro/Nanolithography MEMS and MOEMS 2014 / 10 Vol. 13; Iss. 4

UV LED lithography with digitally tunable exposure dose

Yapici, Murat Kaya, Farhat, Ilyas
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.13.4.043004
Date:
October, 2014
File:
PDF, 2.99 MB
english, 2014
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