Analytical and finite element method design of quartz...

Analytical and finite element method design of quartz tuning fork resonators and experimental test of samples manufactured using photolithography 1—significant design parameters affecting static capacitance C0

Sungkyu Lee, Yangho Moon, Jeongho Yoon, Hyungsik Chung
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Volume:
75
Year:
2004
Language:
english
Pages:
13
DOI:
10.1016/j.vacuum.2003.12.156
File:
PDF, 488 KB
english, 2004
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