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Analytical and finite element method design of quartz tuning fork resonators and experimental test of samples manufactured using photolithography 1—significant design parameters affecting static capacitance C0
Sungkyu Lee, Yangho Moon, Jeongho Yoon, Hyungsik ChungVolume:
75
Year:
2004
Language:
english
Pages:
13
DOI:
10.1016/j.vacuum.2003.12.156
File:
PDF, 488 KB
english, 2004