Film structure and optical constants of magnetron-sputtered...

Film structure and optical constants of magnetron-sputtered fluoride films for deep ultraviolet lithography

Yusuke Taki
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Volume:
74
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2004.01.009
File:
PDF, 270 KB
english, 2004
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