Etching mechanism of (Pb,Sr)TiO3 thin films for DRAM...

Etching mechanism of (Pb,Sr)TiO3 thin films for DRAM application using Cl2/Ar inductively coupled plasma

Gwan-Ha Kim, Kyoung-Tae Kim, Dong-Pyo Kim, Chang-Il Kim
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Volume:
74
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2004.01.018
File:
PDF, 213 KB
english, 2004
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