Surface modification of TiN films by nitrogen ion beam...

Vacuum 2004 Vol. 74; Iss. 3-4

Surface modification of TiN films by nitrogen ion beam irradiation in ethylene gas atmosphere

Isao Nakamura, Daisuke Matsui, Michiko Sasaki, Ichiro Takano, Yoshio Sawada
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Volume:
74
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2004.01.039
File:
PDF, 199 KB
english, 2004
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