Study on facing-target sputtering assisted by microwave plasma for enhanced ionization of sputtered atoms
Akira Yonesu, Suguru Watashi, Kiyotaka Kagawa, Yasumasa YamashiroVolume:
74
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2004.01.047
File:
PDF, 300 KB
english, 2004