SPIE Proceedings [SPIE 32nd Annual Technical Symposium -...

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SPIE Proceedings [SPIE 32nd Annual Technical Symposium - San Diego, CA (Monday 15 August 1988)] Stray Light and Contamination in Optical Systems - Performance Of A Fully Automated Scatterometer For BRDF And BTDF Measurements At Visible And Infrared Wavelengths

Anderson, Scot, Pompea, Stephen M., Shepard, Donald F., Castonauay, Raymond, Breault, Robert P.
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Volume:
967
Year:
1989
Language:
english
DOI:
10.1117/12.948100
File:
PDF, 2.72 MB
english, 1989
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