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A study on the pumping performance of the disk-type drag pumps for spiral channel in rarefied gas flow
Myoung-Keun Kwon, Young-Kyu HwangVolume:
76
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.vacuum.2004.05.011
File:
PDF, 537 KB
english, 2004