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Nanosized columnar microstructure and related properties of electron gun deposited Al2O3 thin films
E. Krumov, V. Mankov, K. StarbovaVolume:
76
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2004.07.016
File:
PDF, 211 KB
english, 2004