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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Novel Batch Titanium Nitride CVD Process for Advanced Metal Electrodes
Zagwijn, Peter M., Verweij, Wilco, Pierreux, Dieter, Adjeroud, Noureddine, Bankras, Radko, Oosterlaken, Ed, Snijders, Gert Jan, Van den Hout, Michiel, Fischer, Pamela, Wilhelm, Rudi, Knapp, MartinVolume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2911530
File:
PDF, 294 KB
english, 2008