Investigation of nitrogen distribution in samples produced...

Vacuum 2004 Vol. 76; Iss. 2-3

Investigation of nitrogen distribution in samples produced by ion-induced deposition of Cr films on aluminum under nitrogen ions bombardment

A.V. Goncharov, A.G. Guglya, I.G. Marchenko, I.M. Neklyudov
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Volume:
76
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2004.07.051
File:
PDF, 181 KB
english, 2004
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