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Low-pressure sublimation epitaxy of AlN films—growth and characterization
M. Beshkova, Z. Zakhariev, M.V. Abrashev, E. Birch, A. Kakanakova, R. YakimovaVolume:
76
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2004.07.052
File:
PDF, 196 KB
english, 2004