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Effect of high-frequency electromagnetic field on Te+- implanted (0 0 1) Si
M. Kalitzova, E. Vlakhov, Y. Marinov, K. Gesheva, V. Ignatova, O. Lebedev, C. Muntele, R. GijbelsVolume:
76
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2004.07.055
File:
PDF, 272 KB
english, 2004