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Fabrication of nanoresonator biosensing arrays using nanoimprint lithography
Janzen, Alex, Poshtiban, Sommayyeh, Singh, Amit, Evoy, StephaneVolume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.2.023013
Date:
June, 2012
File:
PDF, 1.86 MB
english, 2012