Behaviors of carrier concentrations and mobilities in indium–tin oxide thin films by DC magnetron sputtering at various oxygen flow rates
Ho-Chul Lee, O. Ok ParkVolume:
77
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.vacuum.2004.08.006
File:
PDF, 402 KB
english, 2004