Plasma polymer films rf sputtered from PTFE under various...

Vacuum 2005 Vol. 77; Iss. 2

Plasma polymer films rf sputtered from PTFE under various argon pressures

V. Stelmashuk, H. Biederman, D. Slavínská, J. Zemek, M. Trchová
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Volume:
77
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.vacuum.2004.08.011
File:
PDF, 335 KB
english, 2005
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