Two microthermal shear stress sensors: surface...

Journal of Micro/Nanolithography MEMS and MOEMS 2008 / 10 Vol. 7; Iss. 4

Two microthermal shear stress sensors: surface micromachined and bulk-bonding micromachined

Shi, Shali
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Volume:
7
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3033207
Date:
October, 2008
File:
PDF, 1.03 MB
english, 2008
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