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The tribological and structural characterization of nano-structured Ti–Si–N films coated by pulsed-d.c. plasma enhanced CVD
Dayan Ma, Shengli Ma, Kewei XuVolume:
79
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.vacuum.2005.01.003
File:
PDF, 569 KB
english, 2005