High-temperature annealing of electron-irradiated...

High-temperature annealing of electron-irradiated high-voltage diode structures on neutron transmutation-doped Si

F.P. Korshunov, N.E. Zhdanovich, V.I. Karas, I.G. Marchenko
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Volume:
78
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2005.01.028
File:
PDF, 187 KB
english, 2005
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