Irradiation-induced silicide formation in the ion...

Irradiation-induced silicide formation in the ion beam-mixed Au/Si(1 0 0) system at room temperature

R. Khalfaoui, C. Benazzouz, A. Guittoum, N. Tabet, S. Tobbeche
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Volume:
78
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2005.01.030
File:
PDF, 244 KB
english, 2005
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