Ion-beam formation of nanopores and nanoclusters in SiO2

Vacuum 2005 Vol. 78; Iss. 2-4

Ion-beam formation of nanopores and nanoclusters in SiO2

F.F. Komarov, L.A. Vlasukova, O.M. Milchanin, P.I. Gaiduk, V.N. Yuvchenko, S.S. Grechnyi
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Volume:
78
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2005.01.050
File:
PDF, 380 KB
english, 2005
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