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Influence of higher semiinvariants on the fitting parameters of implanted ions distribution
V.V. Ilyina, N.V. Makarets, V.V. MoskalenkoVolume:
78
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2005.01.053
File:
PDF, 175 KB
english, 2005