Deposition of Zr–ZrOX and Y–YXOY films by reactive...

Vacuum 2005 Vol. 78; Iss. 2-4

Deposition of Zr–ZrOX and Y–YXOY films by reactive magnetron sputtering

M. Laurikaitis, J. C˘yvienė, J. Dudonis
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Volume:
78
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2005.01.056
File:
PDF, 231 KB
english, 2005
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