Application of laser ion source for ion implantation...

Vacuum 2005 Vol. 78; Iss. 2-4

Application of laser ion source for ion implantation technology

M. Rosiński, J. Badziak, F.P. Boody, S. Gammino, H. Hora, J. Krása, L. Láska, A.M. Mezzasalma, P. Parys, K. Rohlena, L. Torrisi, J. Ullschmied, J. Wołowski, E. Woryna
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Volume:
78
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2005.01.064
File:
PDF, 225 KB
english, 2005
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