Synthesis of single-phase carbon nitride film prepared by...

Vacuum 2005 Vol. 78; Iss. 2-4

Synthesis of single-phase carbon nitride film prepared by hot implantation

Iwao Shimoyama, Yuji Baba, Tetsuhiro Sekiguchi
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Volume:
78
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2005.01.087
File:
PDF, 542 KB
english, 2005
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