Optimization of the formation process of dielectric...

Vacuum 2005 Vol. 78; Iss. 2-4

Optimization of the formation process of dielectric microwaveguides on the basis of polymer/SiO2/Si systems using ion irradiation

F.F. Komarov, A.V. Leontyev, A.V. Khomich, V.I. Kovalev
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Volume:
78
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2005.01.096
File:
PDF, 256 KB
english, 2005
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