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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 17 August 2014)] Interferometry XVII: Techniques and Analysis - Simultaneous determination of thickness and refractive indices of birefringent wafer by simple transmission measurement
Creath, Katherine, Burke, Jan, Schmit, Joanna, Choi, Hee Joo, Ryu, Jun Yeol, Cha, MyoungsikVolume:
9203
Year:
2014
Language:
english
DOI:
10.1117/12.2063280
File:
PDF, 384 KB
english, 2014