Hydrogen silsesquioxane resist stamp for replication of...

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 03 Vol. 11; Iss. 1

Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers

Saleem, Muhammad Rizwan
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.1.013007
Date:
March, 2012
File:
PDF, 5.88 MB
english, 2012
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