Scaling of Chlorosilane SiC CVD to Multi-Wafer Epitaxy System
Wan, Jian Wei, Loboda, Mark J., MacMillan, Mike F., Chung, Gil Yong, Carlson, E.P., Torres, V.M.Volume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.556-557.145
File:
PDF, 374 KB
english, 2007