Studies on sputtering process of multicomponent...

Vacuum 2006 Vol. 80; Iss. 5

Studies on sputtering process of multicomponent Zr–Ti–Cu–Ni–Be alloy thin films

Senthil N. Sambandam, Shekhar Bhansali, Venkat R. Bhethanabotla, Dinesh K. Sood
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Volume:
80
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.vacuum.2005.07.037
File:
PDF, 346 KB
english, 2006
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