Double layer onset inside the near-electrode sheath of a RF...

Vacuum 2006 Vol. 80; Iss. 5

Double layer onset inside the near-electrode sheath of a RF capacitive discharge in oxygen

V.A. Lisovskiy, V.D. Yegorenkov
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Volume:
80
Year:
2006
Language:
english
Pages:
10
DOI:
10.1016/j.vacuum.2005.07.038
File:
PDF, 297 KB
english, 2006
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