Estimation of amorphous silicon thin film density by...

Vacuum 2005 Vol. 80; Iss. 1-3

Estimation of amorphous silicon thin film density by optical methods

D. Gracin, K. Juraic, I. Bogdanovic-Radovic
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Volume:
80
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2005.08.016
File:
PDF, 168 KB
english, 2005
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