Deposition of photocatalytic TiO2 layers by pulse magnetron sputtering and by plasma-activated evaporation
P. Frach, D. Glöß, Chr. Metzner, T. Modes, B. Scheffel, O. ZywitzkiVolume:
80
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2005.11.001
File:
PDF, 176 KB
english, 2006