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Effects of substrate temperature on tin-doped indium oxide films deposited by dc arc discharge ion plating
Hideo Omoto, Atsushi Takamatsu, Takashi KobayashiVolume:
80
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2005.11.031
File:
PDF, 374 KB
english, 2006