Formation of polycrystalline SiGe thin films by the RF...

Formation of polycrystalline SiGe thin films by the RF magnetron sputtering method with Ar–H2 mixture gases

Isao Nakamura, Toru Ajiki, Hirokazu Abe, Daisuke Hoshi, Masao Isomura
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Volume:
80
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2005.11.032
File:
PDF, 190 KB
english, 2006
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