Improvement in thermal stability of B–C–N thin films...

Improvement in thermal stability of B–C–N thin films fabricated by magnetron sputtering using graphite and BN co-target

H. Yokomichi, T. Futakuchi, H. Amekura, N. Kishimoto
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
80
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2005.11.040
File:
PDF, 313 KB
english, 2006
Conversion to is in progress
Conversion to is failed