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Improvement in thermal stability of B–C–N thin films fabricated by magnetron sputtering using graphite and BN co-target
H. Yokomichi, T. Futakuchi, H. Amekura, N. KishimotoVolume:
80
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2005.11.040
File:
PDF, 313 KB
english, 2006