Influence of effective pumping speed on oxygen atom density...

Vacuum 2006 Vol. 80; Iss. 8

Influence of effective pumping speed on oxygen atom density in a plasma post-glow reactor

Uroš Cvelbar, Miran Mozetič, Dušan Babič, Igor Poberaj, Andre Ricard
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Volume:
80
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2005.11.073
File:
PDF, 136 KB
english, 2006
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