SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12...

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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Novel way of microreliefs fabrication for MEMS

Timoshkov, Yu., Stognij, A., Timoshkov, V., Kurmashev, V., Krokhin, Oleg N., Kompanets, Igor N.
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Year:
2012
Language:
english
DOI:
10.1117/12.742606
File:
PDF, 623 KB
english, 2012
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