Thin films deposition with ECR planar plasma source

Vacuum 2006 Vol. 80; Iss. 11-12

Thin films deposition with ECR planar plasma source

Vladimir Tereshin, Aleksandr Bovda, Vera Bovda, Oleg Byrka, Vladimir Chebotarev, Vladimir Fedorchenko, Igor` Garkusha
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Volume:
80
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2006.01.032
File:
PDF, 223 KB
english, 2006
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