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Hydrogen Measurements in SiNx: H/Si Thin Films by ERDA
Ionescu, M., Richards, Bryce, McIntosh, Keith, Siegele, R., Stelcer, E., Cohen, D., Chandra, TaraVolume:
539-543
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.539-543.3551
File:
PDF, 311 KB
english, 2007