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Micro-structured electrode arrays: Glow discharges in Ar and N2 at atmospheric pressure using a variable radio frequency generator
Christian Schrader, Lutz Baars-Hibbe, Karl-Heinz Gericke, Eduard Marinus van Veldhuizen, Nina Lucas, Philipp Sichler, Stephanus BüttgenbachVolume:
80
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2006.01.059
File:
PDF, 185 KB
english, 2006