Poly-silicon thin films by aluminium induced...

Poly-silicon thin films by aluminium induced crystallisation of microcrystalline silicon

G. Ekanayake, H.S. Reehal
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Volume:
81
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.vacuum.2006.03.031
File:
PDF, 605 KB
english, 2006
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