Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite coatings prepared by reactive direct current unbalanced magnetron sputtering
Harish C. Barshilia, B. Deepthi, K.S. RajamVolume:
81
Year:
2006
Language:
english
Pages:
10
DOI:
10.1016/j.vacuum.2006.07.003
File:
PDF, 423 KB
english, 2006