Structure and mechanical properties of DC magnetron...

Structure and mechanical properties of DC magnetron sputtered TiC/Cu films

J. Soldán, J. Musil
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Volume:
81
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.vacuum.2006.07.013
File:
PDF, 488 KB
english, 2006
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