SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, CA (Sunday 31 July 2005)] Nanoengineering: Fabrication, Properties, Optics, and Devices II - Developments of nanoimprint technologies and applications
Ando, Takashi, Kuwabara, Kosuke, Haginoya, Chiseki, Ogino, Masahiko, Ohashi, Kenya, Miyauchi, Akihiro, Dobisz, Elizabeth A., Eldada, Louay A.Volume:
5931
Year:
2005
Language:
english
DOI:
10.1117/12.616384
File:
PDF, 1012 KB
english, 2005