Composite plasma polymer films prepared by RF magnetron...

Vacuum 2007 Vol. 81; Iss. 7

Composite plasma polymer films prepared by RF magnetron sputtering of SiO2 and polyimide

M. Drabik, J. Kousal, Y. Pihosh, A. Choukourov, H. Biederman, D. Slavinska, A. Mackova, A. Boldyreva, J. Pesicka
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Volume:
81
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.vacuum.2006.10.013
File:
PDF, 899 KB
english, 2007
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