Secondary ion emission from Ti and Si targets induced by medium energy Ar+ ion bombardment – Experiment and computer simulation
K. Pyszniak, A. Droździel, M. Turek, A. Wójtowicz, J. SielankoVolume:
81
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2007.01.005
File:
PDF, 394 KB
english, 2007