Influence of deposition pressure on the structural...

Influence of deposition pressure on the structural mechanical and decorative properties of TiN thin films deposited by cathodic arc evaporation

A. Lousa, J. Esteve, J.P. Mejia, A. Devia
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Volume:
81
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2007.04.017
File:
PDF, 268 KB
english, 2007
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