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Influence of deposition pressure on the structural mechanical and decorative properties of TiN thin films deposited by cathodic arc evaporation
A. Lousa, J. Esteve, J.P. Mejia, A. DeviaVolume:
81
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2007.04.017
File:
PDF, 268 KB
english, 2007