Breakdown in planar magnetron discharges of argon on copper
Y. Nunes, A. Wemans, P.R. Gordo, M. Ribau Teixeira, M.J.P. ManeiraVolume:
81
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2007.04.026
File:
PDF, 338 KB
english, 2007