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SPIE Proceedings [SPIE Fundamentals of Laser Assisted Micro- and Nanotechnologies 2010 - St. Petersburg, Russian Federation (Monday 5 July 2010)] Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010 - Effect of laser irradiation on the structures properties such as SiO2/Si
Veiko, V. P., Skvortsov, A. M., Sokolov, V. I., Pham, Quang Tung, Khalecki, R. A., Efimov, E. I., Veiko, Vadim P., Vartanyan, Tigran A.Volume:
7996
Year:
2011
Language:
english
DOI:
10.1117/12.889523
File:
PDF, 293 KB
english, 2011